SEM and Microscope images of MEMS devices
All these images are copyrighted, They can be used for illustration upon request.
Pyroeletric device in microfluidic
Diphasic stream for the creation of transient thermal stimulation of Pyroelectric devices, IES CNRS, Univ. Montpellier
Microfluidic circuits 2010
SU-8 mold of a cell culture chamber, IES CNRS, Univ. Montpellier
Micro thermocouples 2009
Silicon mono / Ti/Pt thermocouple on SOI
Bistable MEMS 2007
Bistable MEMS structures on SOI, LIMMS CNRS, Univ. Tokyo
Micromachined tips 2006
Vertical Silicon micromachined tips, LIMMS CNRS, Univ. Tokyo
Diamond nanocrystals deposited by dielectrophoresis on silicon tips, LIMMS CNRS, Univ. Tokyo
In plane Silicon micromachined tips, LIMMS CNRS, Univ. Tokyo
Nanomechanical Memories 2006
Buckled nanobeams, LIMMS CNRS, Univ. Tokyo
Field Emission resonator 2005
Field emission gauge micromechanical resonator on SOI, LIMMS CNRS, Univ.tokyo
SOI Accelerometers 2004
In plane Silicon micromachined accelerometers, TIMA,CNRS,INPG, UJF
Fingerprint sensor 2003
Frontside bulk micromachined tactile fingerprint senson on CMOS, TIMA CNRS, INPG
Infrared sensor 2002
Frontside bulk micromachined thermopile infra red sensor on CMOS, TIMA CNRS, INPG
MEMS resonators 2000
Surface micromachined MEMS resonators, TIMA CNRS, INPG
Comb Drives 1999
Comb drive microresonator, TIMA CNRS, INPG
