Benoît CHARLOT / Research / Thermal analysis

Integrated Circuits Thermal analysis

The goal of this project is to explore measurement techniques able to produce a map of the temperature at the surface of an IC during computation. In parallel some tools for the analysis of temperature rise on ICs have been developped to compute the temperature map from layout and simulation results .This work has been done in cooperation with several research labs developping small scal temperature mapping techniques such as thermoreflectance and local proble microscopy.

optic imagethermoreflectance image

These pictures shows the temperature rise in 0,35 polysilicon lines when heated by a Joule effect from a current. Left : optical image, right: temperature obtained by thermoreflectance. (images and measurement made by G.Tessier, ESPCI)


Related publications :

  • L.Aigouy, G.Tessier, M.Mortier, B.Charlot, "Scanning thermal imaging of microelectronic circuits with a fluorescent nanoprobe", Appl. Phys. Lett. 87, 184105 (2005).
  • C.Filloy, G.Tessier, S.Hol√©, G.J√©rosolimski, D.Fournier, B. Charlot, "Hot spot detection in integrated circuits working at up to 1 GHz", J. Phys. IV 125, 105-107 (2005).
  • N.Trannoy, F.Nepveu, S.Gomes, P.O.Chapuis, S.Volz, B.Charlot, B.Cretin, S.Dilhaire, G.Tessier and P.Vairac, "Temperature measurement of microsystems by Scanning Thermal Microscopy", in 11th Int'l Workshop on THERMal INvestigations of ICs and Systems, THERMINIC 2005, 27 - 30 September 2005, Belgirate, Lake Maggiore, Italy.
  • S.Grauby, A.Salhi, L-D.Patino Lopez, S.Dilhaire, B.Charlot, W.Claeys, B.Cretin, S.Gomes, G.Tessier, N.Trannoy, P.Vairac and S.Volz, "Temperature variations imaging by thermoreflectance and SThM techniques", in 11th Int'l Workshop on THERMal INvestigations of ICs and Systems, THERMINIC 2005, 27 - 30 September 2005, Belgirate, Lake Maggiore, Italy.
  • P.Vairac, B.Cretin, B.Charlot, S.Dilhaire, S.Gomes, G.Tessier, N.Trannoy and S.Volz, "Ultra-Local temperature mapping with an intrinsic thermocouple", in 11th Int'l Workshop on THERMal INvestigations of ICs and Systems, THERMINIC 2005, 27 - 30 September 2005, Belgirate, Lake Maggiore, Italy.
  • B.Charlot, K.Torki, G.Tessier, C.Filloy and D.Fournier, "A Digital CMOS Circuit For Reflectance Thermography", 10th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC?04, 29 Sept-2 Oct, Sophia Antipolis, France.
    pdf