Benoît CHARLOT / Research / MEMS DFT

MEMS design for Test

Applying design for test techniques developped for digital and analog ICs to Microelectromechanical systems.

Related publications :

  • S.Mir, B.Charlot, B.Courtois, "Extending Fault-Based Testing To Microelectromechanical capteurs", JETTA, Journal of electronic testing :theory and applications, Volume 16, Issue 3, June 2000, pp. 279-288.
  • C.Roman, S.Mir and B.Charlot. "Building an analogue fault simulation tool and its application to MEMS". Microelectronics Journal, 34(10), 2003, pp. 897-906.
  • B.Courtois, S.Mir, B.Charlot and M.Lubaszewski, "From Microelectronics to MEMS Testing", MRQ 2000, IEEE Microelectronics Reliability and Qualification Workshop, 31 Oct-1 Nov, 2000, Hilton, Glendale, California.
  • B.Charlot, S.Mir, E.F.Cota, M.Lubaszewski, B.Courtois, "Fault modeling of suspended thermal MEMS", ITC'99, IEEE International Test Conference, Atlantic city, NJ, USA, 28-30 septembre, 1999, pp. 319-328.
  • B.Charlot, S.Moussouris, S.Mir, B.Courtois, "Fault modeling of electrostatic comb-drives for MEMS", DTM'99, SPIE Symposium on Design, Test and Microfabrication of MEMS/MOEMS, Paris, France, Mars-Avril 1999, pp. 398-405.
  • S.Mir, B.Charlot, B.Courtois, "Extended fault based testing to microelectromechanical systems", ETW'99, European Test Workshop, Constance, Germany, Mai 1999.